
Penulen/Sistem/Penjana Gas ketulenan ultra tinggi
Kawasan aplikasi: semikonduktor elektronik, litar bersepadu berskala besar, MAMS, silikon polihablur silikon monohablur dan epitaksi silikon, LED, TFT, galium nitrida, silikon karbida, penyelidikan dan pembangunan saintifik, analisis eksperimen, dsb.
Penulen/Sistem/Penjana Gas ketulenan ultra tinggi
Ciri-ciri
● Dua menara penjanaan semula penjerapan ganti, operasi berterusan automatik. | ![]() |
Parameter Jadual
Model bersiri | Untuk gas | Indeks gas mentah | Indeks gas produk | |||||||||||
N2 | H2 | THE2 | Dengan | Dia | THE2 | H2THE | CO2 | CO | CH4 | H2 | N2 | Kebutiran | ||
9VV | ● | ● | ● | ● | ● | 5N | ≤0.1ppb | ≤0.1ppb | ≤0.1ppb | ≤0.1ppb | — | ≤0.1ppb | — | 0.003mm |
9OVV | ● | — | ● | ● | ● | 5N | ≤0.1ppb | ≤0.1ppb | ≤0.1ppb | ≤0.1ppb | ≤0.1ppb | ≤0.1ppb | — | 0.003mm |
9VVX | — | — | — | ● | ● | 5N | ≤0.1ppb | ≤0.1ppb | ≤0.1ppb | ≤0.1ppb | ≤0.1ppb | ≤0.1ppb | ≤0.1ppb | 0.003mm |
— | ● | — | — | — | ≤0.1ppb | ≤0.1ppb | ≤0.1ppb | ≤0.1ppb | ≤0.1ppb | — | ≤0.1ppb | 0.003mm | ||
9X | — | — | — | ● | ● | 5N | ≤0.1ppb | ≤0.1ppb | ≤0.1ppb | ≤0.1ppb | ≤0.1ppb | ≤0.1ppb | ≤0.1ppb | 0.003mm |
— | ● | — | — | — | ≤0.1ppb | ≤0.1ppb | ≤0.1ppb | ≤0.1ppb | ≤0.1ppb | — | ≤0.1ppb | 0.003mm | ||
Nota: Spesifikasi aliran biasa:1-20000Nm3/h;Tekanan yang biasa digunakan:1-20Mpa |